Simulation and Metrological Applications for RDL Patterning Development of Glass Substrate

Conference paper

J.-C. Chuang, C.-T. Yang, C.-I.-I. Li, S.-H. Lee, 昌駿李 and S.-H. Kuo

Proceedings - Electronic Components and Technology Conference, pp.990-995

2024

Abstract

Glass Substrate;Finite Element Analysis;Digital Optical Method

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Title: Simulation and Metrological Applications for RDL Patterning Development of Glass Substrate
Creators - without role: J.-C. Chuang - National Tsing Hua University
C.-T. Yang - Industrial Technology Research Institute
C.-I.-I. Li
S.-H. Lee
昌駿李
S.-H. Kuo
Identifiers: 9957774214806774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: Proceedings - Electronic Components and Technology Conference, pp.990-995