Abstract
This paper reports a novel sliding micro valve system, which is capable of switching and injecting liquids with quantitative accuracy in nano liter range without any dead volume in microchip. Surface treatment of slide structure prevents leaks under a pressure of 5 MPa. Since the device is made of Pyrex glass and fluorocarbon coating, it has high chemical tolerance. Sequential process of switching and quantitative injection (10nL) was performed to justify the applicability of this device. © 2006 Society for Chemistry and Micro-Nano Systems.