- Title
- Smooth and pinhole-free Al2O3 films prepared by atomic layer deposition
- Creators - without role
- C.-C. KeP.-T. ChengD.-R. LiuC.-T. LeeJ. SuC.-N. HsiaoT.-P. Perng - 國立清華大學工學院材料科學工程學系
- Publication Details
- Proceedings of the 2005 Annual Conference of the Chinese Society for Materials Science Proceedings of the 2005 Annual Conference of the Chinese Society for Materials Science
- Identifiers
- 9957773499806774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Smooth and pinhole-free Al2O3 films prepared by atomic layer deposition
Proceedings of the 2005 Annual Conference of the Chinese Society for Materials Science Proceedings of the 2005 Annual Conference of the Chinese Society for Materials Science
2005
Metrics
1 Record Views