- Title
- Soft Photocurable Nanoimprint Lithography for Compound Semiconductor Nanostructures
- Creators - without role
- K. MeneouK.Y. Cheng
- Publication Details
- 51th Int. Conf. on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN)
- Identifiers
- 9957777290006774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Soft Photocurable Nanoimprint Lithography for Compound Semiconductor Nanostructures
51th Int. Conf. on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN)
2007
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