Squeeze film damping effects in a micromachined tunneling accelerometer

Conference paper

M. G. da Silva, K. Greiner, J. R. Gilbert, C. H. Liu and T. W. Kenny

ASME winter conference- Symposium on Micro-Electron Mechanical Systems ASME winter conference- Symposium on Micro-Electron Mechanical Systems

1999

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Title: Squeeze film damping effects in a micromachined tunneling accelerometer
Creators - without role: M. G. da Silva
K. Greiner
J. R. Gilbert
C. H. Liu - 國立清華大學工學院動力機械工程學系
T. W. Kenny
Identifiers: 9957774180506774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: ASME winter conference- Symposium on Micro-Electron Mechanical Systems ASME winter conference- Symposium on Micro-Electron Mechanical Systems