Abstract
We developed a stainless-steel diaphragm micropump for micro-channel processes. Components of this pump features: i) stainless-steel substrates with high durability and high chemical resistance for alkali and organic solutions, ii) a piezoelectric stack actuator for controlling the pumping stroke, and iii) an optimized diaphragm structure without plastic deformation. This stainless-steel micropump utilizing the piezoelectric stack actuators, is suitable for pumping liquids into micro channels. Copyright © 2005 by the Transducer Research Foundation, Inc.