Standard CMOS Integrated Ultra-Compact Micromechanical Oscillating Active Pixel Arrays

Kalyani Bhosale; Chao-Yu Chen; Ming-Huang Li; Sheng-Shian Li

doi:10.1109/MEMS51782.2021.9375392

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Conference paper

Standard CMOS Integrated Ultra-Compact Micromechanical Oscillating Active Pixel Arrays

Kalyani Bhosale, Chao-Yu Chen, Ming-Huang Li and Sheng-Shian Li

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol.2021-January, pp.157-160

01/2021

DOI: https://doi.org/10.1109/MEMS51782.2021.9375392

Appears in keyword about Physics

Abstract

arrays

BEOL

CMOS-MEMS

nonlinear vibration

oscillators

phase noise

resonant pixels

resonators

Electronic

Optical and Magnetic Materials

Condensed Matter Physics

Mechanical Engineering

Electrical and Electronic Engineering

This work demonstrates an ultra-compact low power oscillating micromechanical active pixel array based on a 0.35 μm back-end of line (BEOL)-embedded CMOS-MEMS technology. Each pixel consists of a 3-MHz clamped-clamped beam (CCB) MEMS resonator and a power scalable transimpedance amplifier (TIA) that occupies a small area of 70 × 60 μm and draws only 85 μW/pixel. The MEMS resonator is placed next to the TIA with less than 10 μm spacing thanks to the well-defined etch stops in the titanium nitride composite (TiN-C) CMOS-MEMS platform. A multiplexing phase-locked loop (PLL)-driven oscillator is employed to demonstrate the chip functionality. In particular, a nonlinear operation of the resonator tank is used to optimize the phase noise (PN) performance and Allan deviation (ADEV) behavior. The ADEV of 420 ppb averaged over best 3-pixels is exhibited based on such a nonlinear vibration operation.

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Title: Standard CMOS Integrated Ultra-Compact Micromechanical Oscillating Active Pixel Arrays
Translated title: Standard CMOS Integrated Ultra-Compact Micromechanical Oscillating Active Pixel Arrays
Creators - without role: Kalyani Bhosale - National Tsing Hua University
Chao-Yu Chen - Taiwan Semiconductor Manufacturing Company (Taiwan)
Ming-Huang Li - National Tsing Hua University , Institute of Nano Engineering and Microsystems
Sheng-Shian Li - National Tsing Hua University , Institute of Nano Engineering and Microsystems
Publication Details: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol.2021-January, pp.157-160
Identifiers: 9781665419123; 9957776894106774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University; Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper

Standard CMOS Integrated Ultra-Compact Micromechanical Oscillating Active Pixel Arrays

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