- Title
- Strain Engineering of Nanoscale Strained Si MOS Devices
- Creators - without role
- B. F. HsiehS. T. ChangW. C. WangM. N. LiaoC. C. Lee - 國立清華大學工學院動力機械工程學系J. Huang
- Identifiers
- 9957776003406774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 6th International Conference on Silicon Epitaxy and Heterostructures (ICSI-6) 6th International Conference on Silicon Epitaxy and Heterostructures (ICSI-6)
Conference paper
Strain Engineering of Nanoscale Strained Si MOS Devices
6th International Conference on Silicon Epitaxy and Heterostructures (ICSI-6) 6th International Conference on Silicon Epitaxy and Heterostructures (ICSI-6)
2009
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