- Title
- Stress Analysis in Channel Region for nMOSFET Combining CESL Stressor and SiGe Channel
- Creators - without role
- H. W. HsuH. S. HuangC. C. Lee - 國立清華大學工學院動力機械工程學系H. H. TengM. H. HungM. R. PengM. C. WangS. Y. ChenC. H. Liu
- Publication Details
- International Conference on Automatic Control and Artificial Intelligence (ACAI 2012) International Conference on Automatic Control and Artificial Intelligence (ACAI 2012)
- Identifiers
- 9957773230406774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Stress Analysis in Channel Region for nMOSFET Combining CESL Stressor and SiGe Channel
International Conference on Automatic Control and Artificial Intelligence (ACAI 2012) International Conference on Automatic Control and Artificial Intelligence (ACAI 2012)
2012
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