Stress Analysis of Silicon/Hafnium Diboride/Silicon Nitride/Silicon Carbide Thin Film Device

Conference paper

J.-M. Jou, H.-C. Chen and J.-H. Jou

Proc. of 1989 Annu. Conf. of Chinese Soc. for Mat. Sci. Proc. of 1989 Annu. Conf. of Chinese Soc. for Mat. Sci., p.743

1989

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Title: Stress Analysis of Silicon/Hafnium Diboride/Silicon Nitride/Silicon Carbide Thin Film Device
Creators - without role: J.-M. Jou
H.-C. Chen
J.-H. Jou - 國立清華大學工學院材料科學工程學系
Publication Details: Proc. of 1989 Annu. Conf. of Chinese Soc. for Mat. Sci. Proc. of 1989 Annu. Conf. of Chinese Soc. for Mat. Sci., p.743
Identifiers: 9957769952206774
Academic Unit: Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper