- Title
- Stress in Magnetro Sputtered SiC Thin Films
- Creators - without role
- J.-H. Jou - 國立清華大學工學院材料科學工程學系L.HsuS. YehT. Shyy
- Publication Details
- Proc. 1990 Chinese Soc. Mater. Sci. Annual Meeting Proc. 1990 Chinese Soc. Mater. Sci. Annual Meeting, p.481
- Identifiers
- 9957775806506774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Stress in Magnetro Sputtered SiC Thin Films
Proc. 1990 Chinese Soc. Mater. Sci. Annual Meeting Proc. 1990 Chinese Soc. Mater. Sci. Annual Meeting, p.481
1990
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