- Title
- Stress in Magnetro Sputtered Zinc Oxide Thin Films
- Creators - without role
- J.-H. Jou - 國立清華大學工學院材料科學工程學系L.HsuD.-J. ChengC.-C. WuT.Shyy
- Publication Details
- The Proc. of 1991 Annu. Conf. of Chinese Soc. for Mat. Sci. The Proc. of 1991 Annu. Conf. of Chinese Soc. for Mat. Sci.
- Identifiers
- 9957771998806774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Stress in Magnetro Sputtered Zinc Oxide Thin Films
The Proc. of 1991 Annu. Conf. of Chinese Soc. for Mat. Sci. The Proc. of 1991 Annu. Conf. of Chinese Soc. for Mat. Sci.
1991
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