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Stress-optic Coefficient and Thin-film Stress Measurement of Barrier Films by Photoelasticity
Conference paper

Stress-optic Coefficient and Thin-film Stress Measurement of Barrier Films by Photoelasticity

H. C. Chen, 偉中 王, H. C. Kao, M. H. Hsu and P. C. Sung
2019 SEM Annual Conference and Exposition on Experimental and Applied Mechanics
2019

Abstract

Stress-optic Coefficient;Thin-film Stress;Barrier Films;Photoelasticity

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