- Title
- Structural Optimizations of Silicon Based NMOSFETs with a Sunken STI Pattern by Using a Robust Stress Simulation Methodology
- Creators - without role
- C. C. Lee - 國立清華大學工學院動力機械工程學系C. H. LiuR. H. DengY. H. Lin
- Publication Details
- 11th International Nanotech Symposium & Exhibition (NANO KOREA 2013) 11th International Nanotech Symposium & Exhibition (NANO KOREA 2013)
- Identifiers
- 9957774213206774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Structural Optimizations of Silicon Based NMOSFETs with a Sunken STI Pattern by Using a Robust Stress Simulation Methodology
11th International Nanotech Symposium & Exhibition (NANO KOREA 2013) 11th International Nanotech Symposium & Exhibition (NANO KOREA 2013)
2013
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