- Title
- Study of Nanoscale Strained Si NMOSFET with a Silicon-Carbon Alloy Stressor
- Creators - without role
- W. C. WangS. T. ChangJ. HuangC. C. Lee - 國立清華大學工學院動力機械工程學系
- Publication Details
- 6th International Conference on Silicon Epitaxy and Heterostructures (ICSI-6) 6th International Conference on Silicon Epitaxy and Heterostructures (ICSI-6)
- Identifiers
- 9957774312606774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Study of Nanoscale Strained Si NMOSFET with a Silicon-Carbon Alloy Stressor
6th International Conference on Silicon Epitaxy and Heterostructures (ICSI-6) 6th International Conference on Silicon Epitaxy and Heterostructures (ICSI-6)
2009
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