- Title
- Study on the Characteristics of ZnO Thin Film Deposited by Ion Beam Sputter
- Creators - without role
- 宏營 蔡
- Publication Details
- Proceeding of 7th Nano Engineering and Micro System Technology Workshop
- Identifiers
- 9957768295206774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Study on the Characteristics of ZnO Thin Film Deposited by Ion Beam Sputter
Proceeding of 7th Nano Engineering and Micro System Technology Workshop
2003
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