- Title
- Study on the side pull-in of the side comb-drive fingers
- Creators - without role
- I. C. M. ChangM. T. K. HouY. C. ChenR. Chen - 國立清華大學工學院動力機械工程學系
- Publication Details
- International Symposium on Micro and Nano Technology ISMNT-2 International Symposium on Micro and Nano Technology ISMNT-2
- Identifiers
- 9957770586606774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Study on the side pull-in of the side comb-drive fingers
International Symposium on Micro and Nano Technology ISMNT-2 International Symposium on Micro and Nano Technology ISMNT-2
2006
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