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Super hydrophobic/super hydrophilic transparent nanostructured glass fabricated by wet etching
Conference paper

Super hydrophobic/super hydrophilic transparent nanostructured glass fabricated by wet etching

Amarendra Kumar, Kunal Kashyap, Kai Wei Liao, Max T. Hou and J. Andrew Yeh
9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014, pp.113-116
09/2014

Abstract

Glass Nanostructure Mask less lithography Super hydrophilicity Super hydrophobicity Wet chemical etching Control and Systems Engineering Electrical and Electronic Engineering
Glass nanostructures were fabricated by wet chemical etching instead of using the complicated nanolithography and expensive dry etching process. Super hydrophilic glass with contact angle of 1° was created using this nanostructure with 92% transparency. Self-assembled monolayer of Perfluorodecyl-trichlorosilane (FDTS) was used to further make the glass super hydrophobic with contact angle of 151° without affecting its transparency. Polysilicon layer of 300 nm was deposited on glass substrate first and nanostructures were fabricated in this layer by metal assisted wet chemical etching. Thermal oxidation converted the silicon nanostructure to silicon dioxide nanostructure. This technology is producible on mass scale and useful in preparation of anti-fogging and self-cleaning glass.

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