- Title
- Surface Characteristics of Deposited SiOx film Using Hexamethyldisiloxane (HMDSO) Precursor by Atmospheric Pressure Jet
- Creators - without role
- 宏營 蔡
- Publication Details
- The 7th International Conference on Technological Advances of Thin Films & Surface Coatings 2014
- Identifiers
- 9957777028106774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Surface Characteristics of Deposited SiOx film Using Hexamethyldisiloxane (HMDSO) Precursor by Atmospheric Pressure Jet
The 7th International Conference on Technological Advances of Thin Films & Surface Coatings 2014
2014
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