- Title
- Surface Profile Measurement Method by Multi-Wavelength Confocal Interferometry
- Creators - without role
- 偉中 王T. F. WangC. Y. Lin
- Publication Details
- 2019 SEM Annual Conference and Exposition on Experimental and Applied Mechanics
- Identifiers
- 9957772985906774
- Academic Unit
- Center for India Studies, Office of Academic Affairs, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Surface Profile Measurement Method by Multi-Wavelength Confocal Interferometry
2019 SEM Annual Conference and Exposition on Experimental and Applied Mechanics
2019
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