Surface and Mechanical Characterization of TaN-Ag Nanocomposite Thin Films

Conference paper

C.C. Tseng, J.H. Hsieh, W. Wu, S.Y. Chang and C.L. Chang

Proceedings of ThinFilms 2006 Proceedings of ThinFilms 2006

2006

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Title: Surface and Mechanical Characterization of TaN-Ag Nanocomposite Thin Films
Creators - without role: C.C. Tseng
J.H. Hsieh
W. Wu
S.Y. Chang - 國立清華大學工學院材料科學工程學系
C.L. Chang
Publication Details: Proceedings of ThinFilms 2006 Proceedings of ThinFilms 2006
Identifiers: 9957771074206774
Academic Unit: Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper