Surface patterning of nanofluidic channels and its evaluation using streaming current

We developed surface patterning method in closed nanochannel using VUV light. In addition, change of surface charge was successfully evaluated by streaming current measurements, which was difficult to evaluated in such a small nanochannel by conventional method. Finally, hydrophobic/hydrophilic patterning was successfully developed by this patterning method. This surface patterning method and surface evaluation method will be greatly contribute basic technology for nanofluidics.