Synthesize Highly-textured AiL Thin Films and Study on Its Application to Thin Film Bulk Acoustic Wave Resonators

Conference paper

Cheng-Hsien Chou, Yung-Chen Lin, Jin-Hua Huang, Nyan-Hwa Tai and I-Nan Lin

中國材料科學學會中國材料科學學會

2004

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Title: Synthesize Highly-textured AiL Thin Films and Study on Its Application to Thin Film Bulk Acoustic Wave Resonators
Creators - without role: Cheng-Hsien Chou
Yung-Chen Lin
Jin-Hua Huang
Nyan-Hwa Tai - 國立清華大學工學院材料科學工程學系
I-Nan Lin
Publication Details: 中國材料科學學會中國材料科學學會
Identifiers: 9957770696506774
Academic Unit: Institute of Analytical and Environmental Sciences, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper