Systematic Investigation of Interfacial Fractures of Cu/Low-K Interconnects Using the J-Integral Method

Conference paper

C. C. Lee, K. N. Chiang, T. C. Huang, K. C. Chang, C. H. Yao and C. C. Hsia

2006 ANSYS Taiwan User Conference 2006 ANSYS Taiwan User Conference, pp.143-145

2006

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Title: Systematic Investigation of Interfacial Fractures of Cu/Low-K Interconnects Using the J-Integral Method
Creators - without role: C. C. Lee - 國立清華大學工學院動力機械工程學系
K. N. Chiang
T. C. Huang
K. C. Chang
C. H. Yao
C. C. Hsia
Identifiers: 9957774788206774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: 2006 ANSYS Taiwan User Conference 2006 ANSYS Taiwan User Conference, pp.143-145