- Title
- The Young’s Modulus of Composite Spacer Contributed on the Stress Effect of N-MOSFET with Contact-Etch-Stop Layer Stressor
- Creators - without role
- Y. C. ChiouC. C. Lee - 國立清華大學工學院動力機械工程學系T. L. TzengC. C. Huang
- Publication Details
- International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2013) International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2013)
- Identifiers
- 9957770990206774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
The Young’s Modulus of Composite Spacer Contributed on the Stress Effect of N-MOSFET with Contact-Etch-Stop Layer Stressor
International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2013) International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2013)
2013
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