- Title
- The development of ultrathin Zr-Cu-Ni-Al-N thin film metallic glass as a diffusion barrier in Cu-Si interconnect
- Creators - without role
- J. LeeJ. G. Duh - 國立清華大學工學院材料科學工程學系
- Identifiers
- 9957771587706774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 一〇五年中國材料科學學會年會 一〇五年中國材料科學學會年會
Conference paper
The development of ultrathin Zr-Cu-Ni-Al-N thin film metallic glass as a diffusion barrier in Cu-Si interconnect
一〇五年中國材料科學學會年會 一〇五年中國材料科學學會年會
2016
Metrics
1 Record Views