- Title
- The effects of nitrogen addition on the diamond films in a 915-MHz microwave plasma enhanced chemical vapor deposition (MPCVD) reactor
- Creators - without role
- 宏營 蔡
- Publication Details
- 16th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide
- Identifiers
- 9957774964806774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
The effects of nitrogen addition on the diamond films in a 915-MHz microwave plasma enhanced chemical vapor deposition (MPCVD) reactor
16th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide
2005
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