Abstract
The effects of process parameters on size, density, structure and field emission properties of Pd-catalyzed, thermal chemical vapor deposition (CVD) grown carbon nanotubes (CNT) were investigated. The Pd particle size and density were measured corresponding to the initial catalytic film thickness and NH 3 pretreatment time. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) were used to study the CNT structures produced under different conditions. It was found that a thicker catalytic film resulted in a wider range of particle diameter, regardless of NH 3 pretreatment time. A shorter pretreating time was found to produce CNTs with similar diameter, while a longer pretreating time lead to nonuniformity.