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The structure and ferroelectric property of La-doped BiFeO 3/SrTiO3 artificial superlattice structure by rf sputtering: Effect of deposition temperature
Conference paper   Peer reviewed

The structure and ferroelectric property of La-doped BiFeO 3/SrTiO3 artificial superlattice structure by rf sputtering: Effect of deposition temperature

Shang-Jui Chiu, Yen-Ting Liu, Ge-Ping Yu, Hsin-Yi Lee and Jia-Hong Huang
Thin Solid Films, Vol.529, pp.85-88
01/02/2013

Abstract

Ferroelectric property La-doped BFO rf sputtering Strain Superlattice
Improvement of ferroelectric property by Lanthanum (La)-doping of BiFeO 3 (BFO) and strain effect of high quality superlattice films deposited at temperature ≧ 700 C was shown in this study. The in-pane (200) radial scans showed that films at deposition temperature above 700 C behaved high strained ∼-1.4% and showed epitaxity properties. The La-doped BFO superlattice structure also behaved higher polarization value ∼ 197 μC/cm 2 and lower leakage current density comparing with BFO superlattice structure shown in our previous study. The ferroelectric properties of superlattice structures are enhanced by lattice strain and strongly correlated with the defect state of films. © 2012 Elsevier B.V.

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