The two-axis magnetostatic-drive single-crystal-si micro scanner driven by back-side electroplating Ni film

Chia-Pao Hsu; Wen-Chien Chen; Tsung-Lin Tang; Ming-Chuen Yip; Weiluen Fang

doi:10.1109/OMEMS.2008.4607874

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Conference paper

The two-axis magnetostatic-drive single-crystal-si micro scanner driven by back-side electroplating Ni film

Chia-Pao Hsu, Wen-Chien Chen, Tsung-Lin Tang, Ming-Chuen Yip and Weiluen Fang

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, pp.152-153

2008

DOI: https://doi.org/10.1109/OMEMS.2008.4607874

Abstract

Electrical and Electronic Engineering

A simple 2-mask process to realize a two-axis micro scanning mirror is presented. The scanning mirror is made of single-crystal-silicon, and Ni is electroplated at the backside of scanner to induce the magnetostatic driving force. © 2008 IEEE.

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Title: The two-axis magnetostatic-drive single-crystal-si micro scanner driven by back-side electroplating Ni film
Creators - without role: Chia-Pao Hsu - National Tsing Hua University
Wen-Chien Chen - National Tsing Hua University
Tsung-Lin Tang - National Tsing Hua University
Ming-Chuen Yip - Power Mechanical Eng. Department
Weiluen Fang - National Tsing Hua University
Identifiers: 9781424419180; 9957770114706774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, pp.152-153

The two-axis magnetostatic-drive single-crystal-si micro scanner driven by back-side electroplating Ni film

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