Thermal Analysis on Laser-Assisted Nano-imprinting Lithography

Conference paper

C.P. Jen, S.W. Chen and C.T. Huang

23rd Chinese Society of Mechanical Engineering Conference 23rd Chinese Society of Mechanical Engineering Conference

2006

Abstract

Thermal Analysis;Laser-Assisted Nano-imprinting Lithography

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Title: Thermal Analysis on Laser-Assisted Nano-imprinting Lithography
Creators - without role: C.P. Jen
S.W. Chen - 國立清華大學原子科學院核子工程與科學研究所
C.T. Huang
Publication Details: 23rd Chinese Society of Mechanical Engineering Conference 23rd Chinese Society of Mechanical Engineering Conference
Identifiers: 9957777387106774
Academic Unit: Institute of Nuclear Engineering and Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper