Thermal stability of electro-plating Ag film on plasma-treated TiN film

Conference paper

C. A. Jong, W. F. Wu, C. W. Ho and R. J. Chung

2011 MRS-Spring 2011 MRS-Spring

2011

Abstract

Thermal stability;electro-plating Ag film;plasma-treated TiN film

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Title: Thermal stability of electro-plating Ag film on plasma-treated TiN film
Creators - without role: C. A. Jong
W. F. Wu - 國立清華大學原子科學院工程與系統科學系
C. W. Ho
R. J. Chung
Publication Details: 2011 MRS-Spring 2011 MRS-Spring
Identifiers: 9957769121506774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper