- Title
- Thermal wet oxidation of Al0.4Ga0.6P
- Creators - without role
- J. H. EppleK. L. ChangG. W. PickrellK. Y. ChengK. C. Hsieh
- Publication Details
- 2000 Electronic Materials Conference
- Identifiers
- 9957771535706774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Thermal wet oxidation of Al0.4Ga0.6P
2000 Electronic Materials Conference
2000
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