- Title
- Thermoelectric properties of annealed ion-implanted silicon thin films
- Creators - without role
- C. N. Liao - 國立清華大學工學院材料科學工程學系K. C. Chen
- Publication Details
- 15th International Conference on Ion Implantation Technology
- Identifiers
- 9957767655006774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Thermoelectric properties of annealed ion-implanted silicon thin films
15th International Conference on Ion Implantation Technology
2004
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