Abstract
In this paper we have designed, fabricated and tested a novel three-dimensional (3D) flexible microprobe used for recording the neural signals of lateral giant (LG) on the escape system of America crayfish. We report an electrostatic actuation process to fold the planar probes to be the arbitrary orientations of 3D probes for neuroscience application. The batch assembly method based on electrostatic force techniques gave more simple fabrication compared with others. A flexible probe could reduce both the chronic inflammation response and material fracture when animal breathes or moves. Furthermore, the cortex corresponds to hypothetical cortical modules with mostly vertically organized layers of neurons. Therefore the 3D flexible probe suits to understand how the cooperative activity for different layers of neurons. Advisedly, we present a novel fabrication for 3D flexible probe by using parylene technology. The mechanical strength of the neural probe is strong enough to penetrate into a bio-gel. At the end, the flexible probe was used to record neural signals of LG cell from America crayfish. © 2009 IEEE.