- Title
- Three-steps mechanism in GeSb9 wet-etching process
- Creators - without role
- K. W. HuY. H. PerngL. H. Chou - 國立清華大學工學院材料科學工程學系
- Publication Details
- IUMRS-ICEM 2010 IUMRS-ICEM 2010
- Identifiers
- 9957766850006774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Three-steps mechanism in GeSb9 wet-etching process
IUMRS-ICEM 2010 IUMRS-ICEM 2010
2010
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