Towards the fabrication platforms for MOEMS

Weileun Fang; Mingching Wu; Hung-Yi Lin; Jerwei Hsieh

doi:10.1109/OMEMS.2007.4373821

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Conference paper

Towards the fabrication platforms for MOEMS

Weileun Fang, Mingching Wu, Hung-Yi Lin and Jerwei Hsieh

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, pp.23-24

2007

DOI: https://doi.org/10.1109/OMEMS.2007.4373821

Abstract

Fabrication platform

MOSbE process

MUMPs process

Fabrication platform is one of the key factors to accelerate the progress of MOEMS (Micro opto-electro-mechanical systems). The two poly-Si MUMPs process is recognized as one of the most popular fabrication platforms for MOEMS. This study intends to introduce three fabrication platforms evolved from MUMPs to improve the performances of MOEMS devices. ©2007 IEEE.

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Title: Towards the fabrication platforms for MOEMS
Creators - without role: Weileun Fang - National Tsing Hua University
Mingching Wu - Institute of Power Engineering
Hung-Yi Lin - Power Mechanical Eng. Department , National Tsing Hua University
Jerwei Hsieh - Institute of Power Engineering
Publication Details: 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, pp.23-24
Identifiers: 1424406412; 9781424406418; 9957766578606774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper

Towards the fabrication platforms for MOEMS

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