- Title
- Tribological Behaviors of CrAlSixN Coatings Derived from RF Magnetron Sputtering
- Creators - without role
- H.W. ChenY.C. ChanJ.G. Duh - 國立清華大學工學院材料科學工程學系J.W. Lee
- Publication Details
- The 11th International Symposium on Sputtering & Plasma Processes The 11th International Symposium on Sputtering & Plasma Processes
- Identifiers
- 9957772286506774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Tribological Behaviors of CrAlSixN Coatings Derived from RF Magnetron Sputtering
The 11th International Symposium on Sputtering & Plasma Processes The 11th International Symposium on Sputtering & Plasma Processes
2011
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