- Title
- Tunable Optical-path-difference Grating using CMOS process
- Creators - without role
- Yu-Sheng YangZheng-San ZhouCheng-Hsien Liu - 國立清華大學工學院動力機械工程學系
- Publication Details
- Proceedings of ASME IMECE MEMS Symposium Proceedings of ASME IMECE MEMS Symposium
- Identifiers
- 9957772317506774
- Academic Unit
- Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Tunable Optical-path-difference Grating using CMOS process
Proceedings of ASME IMECE MEMS Symposium Proceedings of ASME IMECE MEMS Symposium
2001
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