Tunable coupling of silicon optical microresonators by MEMS actuation

Conference paper

Ming-Chang M. Lee, Jin Yao, Ming-Chun Tien and Ming C. Wu

IEEE/LEOS The 5th Workshop on Fibers and Optical Passive Components

2007

Abstract

silicon;microresonators;MEMS

1 Record Views

Title: Tunable coupling of silicon optical microresonators by MEMS actuation
Creators - without role: Ming-Chang M. Lee - 國立清華大學電機資訊學院電機工程學系
Jin Yao
Ming-Chun Tien
Ming C. Wu
Identifiers: 9957769101106774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: IEEE/LEOS The 5th Workshop on Fibers and Optical Passive Components