Two-dimensional electron gas (2DEG) IDT SAW devices on AlGaN/GaN heterostructure

King-Yuen Wong; Wilson Tang; Kei May Lau; Kevin J. Chen

doi:10.1109/NANO.2007.4601361

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Conference paper

Two-dimensional electron gas (2DEG) IDT SAW devices on AlGaN/GaN heterostructure

King-Yuen Wong, Wilson Tang, Kei May Lau and Kevin J. Chen

2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings, pp.1041-1044

2007

DOI: https://doi.org/10.1109/NANO.2007.4601361

Appears in keyword about Physics

Abstract

AlGaN/GaN and fluoride-based plasma treatment

Surface acoustic wave

Two-dimensional electron gas

Electrical and Electronic Engineering

Atomic and Molecular Physics

and Optics

Surface acoustic wave (SAW) devices using two-dimensional electron gas (2DEG) as interdigital transducers (IDTs) on AlGaN/GaN heterostructure has been demonstrated using a planar isolation technique based on the fluoride-based (CF ₄ ) plasma treatment technique. The RF characteristics of the SAW filters with planar 2DEG IDTs are compared with SAW devices that are made of metal IDTs or hybrid metal/2DEG IDTs. © 2007 IEEE.

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Title: Two-dimensional electron gas (2DEG) IDT SAW devices on AlGaN/GaN heterostructure
Translated title: Two-dimensional electron gas (2DEG) IDT SAW devices on AlGaN/GaN heterostructure
Creators - without role: King-Yuen Wong - IEEE
Wilson Tang - Department of Electronic and Computer Engineering , Hong Kong University of Science and Technology
Kei May Lau - Hong Kong University of Science and Technology
Kevin J. Chen - Hong Kong University of Science and Technology
Identifiers: 1424406080; 9781424406081; 9957770625406774
Academic Unit: Institute of Electronics Engineering, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings, pp.1041-1044

Two-dimensional electron gas (2DEG) IDT SAW devices on AlGaN/GaN heterostructure

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