Abstract
Vibrating polysilicon micromechanical ring resonators, utilizing a unique extensional wine-glass mode shape to achieve lower impedance than previous UHF resonators, have been demonstrated at frequencies as high as 1.2-GHz with a Q of 3,700, and 1.47-GHz (highest to date) with a Q of 2,300. The 1.2-GHz resonator exhibits a measured motional resistance of 560kΩ with a de-bias voltage of 20V, which is 6X lower than measured on radial contour mode disk counterparts at the same frequency, and which can be driven down as low as 2kΩ when a de-bias voltage of 100V and electrode-to-resonator gap spacing of 460Å are used. The above high Q and low impedance advantages, together with the multiple frequency, on-chip integration advantages afforded by electrostatically-transduced μmechanical resonators, make this device an attractive candidate for use in the front-end RF filtering and oscillator functions needed by wireless communication devices.