ULTRAFAST DEEP UV LITHOGRAPHY USING EXCIMER LASERS.

Conference paper

K. Jain, C.G. Willson, S. Rice, L. Pederson and B.J. Lin

Kodak Publication, (G-136), pp.8-10

1983

Abstract

Engineering (all)

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Title: ULTRAFAST DEEP UV LITHOGRAPHY USING EXCIMER LASERS.
Translated title: ULTRAFAST DEEP UV LITHOGRAPHY USING EXCIMER LASERS.
Creators - without role: K. Jain
C.G. Willson
S. Rice
L. Pederson
B.J. Lin
Publication Details: Kodak Publication, (G-136), pp.8-10
Identifiers: 0879853387; 9957767205106774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper