ULTRAFAST DEEP UV LITHOGRAPHY USING EXCIMER LASERS.

Conference paper

K. Jain, C.G. Willson, S. Rice, L. Pederson and B.J. Lin

Technical Papers, Regional Technical Conference - Society of Plastics Engineers, pp.173-183

1982

Abstract

Engineering (all)

1 Record Views

Title: ULTRAFAST DEEP UV LITHOGRAPHY USING EXCIMER LASERS.
Translated title: ULTRAFAST DEEP UV LITHOGRAPHY USING EXCIMER LASERS.
Creators - without role: K. Jain
C.G. Willson
S. Rice
L. Pederson
B.J. Lin
Publication Details: Technical Papers, Regional Technical Conference - Society of Plastics Engineers, pp.173-183
Identifiers: 9957775434306774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper