Abstract
A general method for immobilization of capture ligands in a single channel of extended nanospace depth is reported. For multiplexed analysis in a single channel, several ligands must be immobilized in the same channel. Since the bonding procedure (by heat/ HF) for glass and fused silica chips would destroy the ligands, we designed and synthesized a UV-activated linker for covalent ligand attachment inside the channels after fabrication. A modified mask aligner was used to align OHP or Cr masks to the channels to facilitate immobilization of the DNA capture oligos to pre-defined areas.