Ultra-Thin Si/Si3N4Composite Waveguide for Low-Loss and High-Speed Photonic Integrated Circuits

The Anh Nguyen; Ming-Chang M. Lee

doi:10.1109/OECC48412.2020.9273444

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Conference paper

Ultra-Thin Si/Si3N4Composite Waveguide for Low-Loss and High-Speed Photonic Integrated Circuits

The Anh Nguyen and Ming-Chang M. Lee

25th Opto-Electronics and Communications Conference, OECC 2020, 9273444

10/2020

DOI: https://doi.org/10.1109/OECC48412.2020.9273444

Appears in keyword about Physics

Abstract

Computer Networks and Communications

Electrical and Electronic Engineering

Electronic

Optical and Magnetic Materials

Instrumentation

Atomic and Molecular Physics

and Optics

We propose and demonstrate a novel Si/Si3N4 composite waveguide structure potentially for implementing low-loss and high-speed photonic integrated circuits. The measured waveguide propagation loss is 0.46 dB/cm.

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Title: Ultra-Thin Si/Si3N4Composite Waveguide for Low-Loss and High-Speed Photonic Integrated Circuits
Translated title: Ultra-Thin Si/Si3N4Composite Waveguide for Low-Loss and High-Speed Photonic Integrated Circuits
Creators - without role: The Anh Nguyen - National Tsing Hua University
Ming-Chang M. Lee - National Tsing Hua University
Publication Details: 25th Opto-Electronics and Communications Conference, OECC 2020, 9273444
Identifiers: 9781728154459; 9957772076806774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper

Ultra-Thin Si/Si3N4Composite Waveguide for Low-Loss and High-Speed Photonic Integrated Circuits

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