- Title
- Ultra-thin (AlCrTaTiZrRux)Ny Multi-component Films as Robust Diffusion Barrier Layers for Cu Interconnect Application
- Creators - without role
- Shou-Yi Chang - 國立清華大學工學院材料科學工程學系Chen-En LiSheng-Cheng ChiangChen-Yuan WangDao-Sheng ChenMing-Ku Chen
- Publication Details
- Proceedings of International Union of Materials Research Societies – 12th International Conference in Asia Proceedings of International Union of Materials Research Societies – 12th International Conference in Asia (IUMRS-ICA 2011)
- Identifiers
- 9957776913806774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Ultra-thin (AlCrTaTiZrRux)Ny Multi-component Films as Robust Diffusion Barrier Layers for Cu Interconnect Application
Proceedings of International Union of Materials Research Societies – 12th International Conference in Asia Proceedings of International Union of Materials Research Societies – 12th International Conference in Asia (IUMRS-ICA 2011)
2011
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