Ultra-thin Polyimide Films by Vapor Deposition Polymerization

Conference paper

C.-L. Cheng and J.-H. Jou

The International Electron Devices and Materials Symposium The International Electron Devices and Materials Symposium

1996

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Title: Ultra-thin Polyimide Films by Vapor Deposition Polymerization
Creators - without role: C.-L. Cheng
J.-H. Jou - 國立清華大學工學院材料科學工程學系
Publication Details: The International Electron Devices and Materials Symposium The International Electron Devices and Materials Symposium
Identifiers: 9957767278106774
Academic Unit: Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper