Abstract
We designed a microchip-based gas analysis system to realize ultrasensitive (0.1ppb) and continuous (1 measurement/15 min) detection of ammonia gas in a cleanroom for semiconductor process control. The detection processes consisted of stable gas/liquid laminar flow formation, gas/liquid adsorption and concentration, colorimetric reaction, and TLM (thermal lens microscope) detection for the non-fluorescent molecules. All these processes were integrated into microchips. The detection limit of ~0.05 ppb in 15 min analysis time was realized, and the basic performance was verified.