Ultrafast Deep UV Lithography with Excimer Lasers. LITHOGRAPHIE RAPIDE A HAUTE RESOLUTION, EN UV PROFOND, UTILISANT DES LASERS EXCIMERES.

Conference paper

K. Jain, C.G. Willson and B.J. Lin

1982

Abstract

Engineering (all)

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Title: Ultrafast Deep UV Lithography with Excimer Lasers. LITHOGRAPHIE RAPIDE A HAUTE RESOLUTION, EN UV PROFOND, UTILISANT DES LASERS EXCIMERES.
Translated title: Ultrafast Deep UV Lithography with Excimer Lasers. LITHOGRAPHIE RAPIDE A HAUTE RESOLUTION, EN UV PROFOND, UTILISANT DES LASERS EXCIMERES.
Creators - without role: K. Jain
C.G. Willson
B.J. Lin
Identifiers: 9957767037006774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper